4.7 Article

Rotational varifocal moire metalens made of single-crystal silicon meta-atoms for visible wavelengths

Journal

NANOPHOTONICS
Volume 11, Issue 9, Pages 1941-1948

Publisher

WALTER DE GRUYTER GMBH
DOI: 10.1515/nanoph-2021-0690

Keywords

dielectric metasurface; metalens; silicon; varifocal; waveguide

Funding

  1. JSPS KAKENHI [21H01781]
  2. Nanotechnology Platform Program of the Ministry of Education, Culture, Sports, Science and Technology(MEXT), Japan [JPMXP09F11858]
  3. JST Adaptable and Seamless Technology-transfer Program through Targetdriven RD (A-STEP) [JPMJTM20MK]
  4. Grants-in-Aid for Scientific Research [21H01781] Funding Source: KAKEN

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In this study, a rotational varifocal metalens based on octagonal single-crystal silicon pillars was designed and fabricated to achieve high transmittance, whole 2 pi phase coverage, and polarization insensitivity for visible wavelengths. The fabricated moire metalens demonstrated a focal length that can be tuned from -36 mm to -2 mm and from 2 to 12 mm by mutual rotation from -90 degrees to 90 degrees, and imaging was demonstrated at three distinct wavelengths of 633, 532, and 440 nm.
Metasurface lenses (metalenses) offer an ultrathin and simple optical system with dynamic functions that include focal length tuning. In this study, a rotational varifocal (i.e., moire) metalens based on octagonal single-crystal silicon pillars was designed and fabricated to realize a high transmittance, whole 2 pi phase coverage, and polarization insensitivity for visible wavelengths. The moire metalens consists of a pair of cascaded metasurface-based phase lattices and the focal length can be adjusted from negative to positive by mutual rotation. The fabricated moire metalens demonstrated a focal length that can be tuned from -36 mm to -2 mm and from 2 to 12 mm by mutual rotation from -90 degrees to 90 degrees, and the experimental measurements agreed well with theoretical values at the design wavelength of 633 nm. Imaging was demonstrated at three distinct wavelengths of 633, 532, and 440 nm.

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