Related references
Note: Only part of the references are listed.Roll-to-roll nanoimprint lithography using a seamless cylindrical mold nanopatterned with a high-speed mastering process
Nichole Cates et al.
NANOTECHNOLOGY (2021)
The Fabrication of a Cylindrical Nano Mold Based on UV Photolithography
Pan Kyeom Kim et al.
SCIENCE OF ADVANCED MATERIALS (2020)
Prism-Based Laser Interference Lithography System for Simple Multibeam Interference Lithography
Jun Han Park et al.
SCIENCE OF ADVANCED MATERIALS (2020)
System for Fabrication of Large-Area Roll Molds by Step-and-Repeat Liquid Transfer Imprint Lithography
Hyungjun Lim et al.
MATERIALS (2020)
Structural Color Surface on Transparent PDMS Fabricated by Carbon-Assisted Laser Interference Lithography for Real-Time Quantification of Soft Actuators Motion
Chenchu Zhang et al.
ACS APPLIED MATERIALS & INTERFACES (2020)
Step and scanning lithography for patterning seamless microstructures on the inner surface of a hollow roller
Hoang-Tri Nguyen et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2019)
R2R Nano-patterning Technology Using 250 mm-wide Seamless Roller Mold
Kazuma Komatsu et al.
2019 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP 2019) (2019)
Real-Time Compensation of Simultaneous Errors Induced by Optical Phase Difference and Substrate Motion in Scanning Beam Laser Interference Lithography System
Minsoo Kim et al.
IEEE-ASME TRANSACTIONS ON MECHATRONICS (2018)
Fabrication of the grid pattern on a roll mold by electron beam direct writing
Yuta Takano et al.
MICROELECTRONIC ENGINEERING (2018)
Seamless tool fabrication for Roll-to-Roll microreplication
A. Striegel et al.
MICROELECTRONIC ENGINEERING (2018)
Fabrication of Superhydrophobic Metallic Surface by Wire Electrical Discharge Machining for Seamless Roll-to-Roll Printing
Jin-Young So et al.
METALS (2018)
High-Speed Roll-to-Roll Hot Embossing of Micrometer and Sub Micrometer Structures Using Seamless Direct Laser Interference Patterning Treated Sleeves
Andreas Rank et al.
ADVANCED ENGINEERING MATERIALS (2017)
Fabrication characteristics of a line-and-space pattern and a dot pattern on a roll mold by using electron-beam lithography
Kai Ojima et al.
JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING (2016)
Multiple beam interference lithography: A tool for rapid fabrication of plasmonic arrays of arbitrary shaped nanomotifs
M. Vala et al.
OPTICS EXPRESS (2016)
Large-Area Low-Cost Plasmonic Perfect Absorber Chemical Sensor Fabricated by Laser Interference Lithography
Shahin Bagheri et al.
ACS SENSORS (2016)
Sub-100 nm features seamless roller mold using anodization and atomic layer deposition, for roll-to-roll nanoimprint lithography
Lee Kheng Tan et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2016)
Fabrication of moth-eye structures on silicon by direct six-beam laser interference lithography
Jia Xu et al.
JOURNAL OF APPLIED PHYSICS (2014)
High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography
Jarrett J. Dumond et al.
NANOTECHNOLOGY (2012)
Origination of nano- and microstructures on large areas by interference lithography
Andreas J. Wolf et al.
MICROELECTRONIC ENGINEERING (2012)
Pattern definition employing prism-based deep ultraviolet lithography
R. Sidharthan et al.
MICRO & NANO LETTERS (2011)
Fabrication of a seamless roll mold using inorganic electron beam resist with postexposure bake
Noriyuki Unno et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2011)
Electron beam lithography on cylindrical roller
Shih Chun Tseng et al.
MICROELECTRONIC ENGINEERING (2010)
Sub-50 nm patterning by immersion interference lithography using a Littrow prism as a Lloyd's interferometer
Johannes de Boor et al.
OPTICS LETTERS (2010)
Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting
Se Hyun Ahn et al.
ACS NANO (2009)
High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates
Se Hyun Ahn et al.
ADVANCED MATERIALS (2008)
Fabrication of nanostructures with laser interference lithography
Q. Xie et al.
JOURNAL OF ALLOYS AND COMPOUNDS (2008)
Resin micromachining by roller hot embossing
Naoya Ishizawa et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2008)
Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns
Suho Ahn et al.
APPLIED PHYSICS LETTERS (2006)
Share Paper
