4.6 Review

Review of Recent Development of MEMS Speakers

Journal

MICROMACHINES
Volume 12, Issue 10, Pages -

Publisher

MDPI
DOI: 10.3390/mi12101257

Keywords

microelectromechanical systems; MEMS; loudspeakers; microspeakers

Funding

  1. National Science and Technology Major Project of China [2018YFF01010904]
  2. Beijing Institute of Technology Startup Funds
  3. Foshan Science and Technology Innovation Team Project [2018IT100252]

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Facilitated by MEMS technology, MEMS speakers have rapidly developed over the past decade to meet the growing demands of the audio market. These speakers, with advantages of small size, low cost, and easy assembly, are drawing extensive attention for potential applications in various fields.
Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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