4.7 Article

Planar ultrasonic transducer based on a metasurface piezoelectric ring array for subwavelength acoustic focusing in water

Journal

SCIENTIFIC REPORTS
Volume 12, Issue 1, Pages -

Publisher

NATURE PORTFOLIO
DOI: 10.1038/s41598-022-05547-7

Keywords

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Funding

  1. Human Plus Convergence Research and Development Program - National Research Foundation of Korea and ICT and Future Planning [NB0840]
  2. Industrial Strategic Technology Development Program (MT2020) - Ministry of Trade, Industry, & Energy (MOTIE, Korea)

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In this study, a new ultrasonic transducer with improved focusing performance was designed and tested. The experimental results demonstrated that the transducer had a high ability to produce needle-like subwavelength focusing beams in water, making it potentially useful for high-resolution imaging devices or medical ultrasound focusing devices.
The development of a new ultrasonic transducer capable of improved focusing performance has become a necessity to overcome the limitations of conventional ultrasonic transducer technology. In this study, we designed and optimized a metasurface piezoelectric ring device, and using multiphysics finite element analysis, we examined the performance of a planar ultrasonic transducer consisting of this device, a matching layer, a backing layer, and housing in producing a needle-like subwavelength focusing beam in water. For practical experiments, a metasurface piezoelectric ring device was fabricated using a laser ablation process. Subsequently, using a pulse-echo test, we found that the - 6 dB bandwidth of a planar ultrasonic transducer with a center frequency of 1.0 MHz was 37.5%. In addition, the results of an ultrasonic-focusing performance test showed that the full width at half-maximum of the axial subwavelength focusing beam was 0.78 lambda, and the full lateral width at half-maximum of the subwavelength lateral focusing beam was 7.03 lambda at a distance of 10.89 lambda. The needle-like focused ultrasonic beam technology implemented with a piezoelectric ring array based new planar ultrasound transducer is expected to be used in high-resolution imaging devices or medical ultrasound focusing devices in the future.

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