Journal
SCIENTIFIC REPORTS
Volume 11, Issue 1, Pages -Publisher
NATURE PORTFOLIO
DOI: 10.1038/s41598-021-02293-0
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Funding
- Ministry of Economic Affairs, Taiwan [108-EC-17-A-07-S3-052]
- Ministry of Science and Technology, Taiwan [107-2221-E-005-058-MY3, 108-2221-E-005-072-MY3, 108-2811-E-005-512-MY3, 110-2218-E-A49-012-MBK]
- Innovation and Development Center of Sustainable Agriculture from The Featured Areas Research Center Program by the Ministry of Education in Taiwan
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The mechanism of carrier recombination in downsized mu-LED chips was investigated, showing that the smallest chip size exhibited the highest ideality factor due to carrier recombination in high-defect-density zones. The use of a passivation layer and a maskless technology improved the performance and efficiency of the mu-LED chips. The blue-shift phenomenon in the electroluminescence spectrum was attributed to carrier screening and band filling effects, with high EQE values observed in the high current density region for the 10 x 10 μm(2) mu-LED chip.
The mechanism of carrier recombination in downsized mu-LED chips from 100 x 100 to 10 x 10 mu m(2) on emission performance was systemically investigated. All photolithography processes for defining the mu-LED pattern were achieved by using a laser direct writing technique. This maskless technology achieved the glass-mask-free process, which not only can improve the exposure accuracy but also save the development time. The multi-functional SiO2 film as a passivation layer successfully reduced the leakage current density of mu-LED chips compared with the mu-LED chips without passivation layer. As decreasing the chip size to 10 x 10 mu m(2), the smallest chip size exhibited the highest ideality factor, which indicated the main carrier recombination at the high-defect-density zone in mu-LED chip leading to the decreased emission performance. The blue-shift phenomenon in the electroluminescence spectrum with decreasing the mu-LED chip size was due to the carrier screening effect and the band filling effect. The 10 x 10 mu m(2) mu-LED chip exhibited high EQE values in the high current density region with a less efficiency droop, and the max-EQE value was 18.8%. The luminance of 96 x 48 mu-LED array with the chip size of 20 x 20 mu m(2) exhibited a high value of 516 nits at the voltage of 3 V.
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