Journal
NATURE COMMUNICATIONS
Volume 12, Issue 1, Pages -Publisher
NATURE PORTFOLIO
DOI: 10.1038/s41467-021-27208-5
Keywords
-
Categories
Funding
- National Science Foundation [ECCS-1950009, CMMI-1928788]
Ask authors/readers for more resources
The direct transfer of pre-patterned materials plays a crucial role in the development of high-performance functional systems. By utilizing a self-delamination-driven pattern transfer method, the authors successfully integrated a single crystalline silicon thin membrane into a multi-functional system.
Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in a liquid media. Direct transfer of pre-patterned device-grade nano-to-microscale materials highly benefits many existing and potential, high performance, heterogeneously integrated functional systems over conventional lithography-based microfabrication. We present, in combined theory and experiment, a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in liquid media. This pattern transfer allows the usage of an intermediate or mediator substrate where both front and back sides of a thin membrane are capable of being integrated with standard lithographical processing, thereby achieving deterministic assembly of the thin membrane into a multi-functional system. Implementations of these capabilities are demonstrated in broad variety of applications ranging from electronics to microelectromechanical systems, wetting and filtration, and metamaterials.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available