Journal
VACUUM
Volume 195, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2021.110643
Keywords
GaAs nanowires; Doping; Phase control; Molecular beam epitaxy
Funding
- National Natural Science Foundation of China [61674021, 11674038, 61704011, 61904017, 11804335, 12074045]
- Developing Project of Science and Technology of Jilin Province [20200301052RQ]
- Project of Education Department of Jilin Province [JJKH20200763KJ]
- Youth Foundation of Changchun University of Science and Technology [XQNJJ-2018-18]
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Controlling the crystal structure of GaAs nanowires with Si doping and V/III ratio has been shown to influence the nucleation of ZB phase and result in different conductivity types in FET devices. These results provide a clear route towards nanoscale device fabrication.
We realized the control on the crystal structure of GaAs nanowires (NWs) by silicon (Si) doping and V/III ratio. This viewpoint has been clearly evidenced by Raman spectrum combined with high-resolution transmission electron microscopy (HRTEM). Undoped GaAs NWs generally show a mixture of zinc blende (ZB) and wurtzite (WZ) phases; the addition of Si dopant and high V/III ratio are beneficial for the nucleation of ZB structure. Field effect transistor (FET) devices were fabricated to show that Si-doped GaAs NWs exhibit p-type conductivity in the low V/III ratio of 25.8 and n-type conductivity in the high V/III ratio of 51.6. These results provide a clear route for achieving GaAs NWs phase control and different conductivity types, which is an essential step towards the fabrication of nanoscale devices.
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