Journal
VACUUM
Volume 193, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2021.110545
Keywords
Plasma nitriding; Austenitic stainless steel; Expanded austenitic phase; Plasma monitoring; Admixed gas composition; Nitrogen penetration
Funding
- Nanotechnology Platform Program (Characterization and Fabrication) of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan
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The study showed that a thick surface layer was formed when using H-2-N-2 plasma on AISI316L, while Ar-N-2 plasma was ineffective for nitriding. The population of N-2(+) species in the plasma was identified as a key factor for optimization.
The influence of discharge gas composition on the plasma nitriding of AISI316L austenitic stainless steel was investigated using a laboratory-made apparatus consisting of a DC diode and a plasma monitoring system. H-2-N-2 and Ar-N-2 gas mixtures with various mixture ratios were introduced in the apparatus, and nitriding was performed without auxiliary substrate heating. A >4 mu m-thick surface layer, consisting of an expended austenitic phase,gamma(N), was formed on the AISI316L substrate when the optimized H-2-N-2 plasma was used. The thickness and maximum nitrogen content of the surface layer increased with an increase in the population of N-2(+) species in the plasma; the N-2(+) population in the plasma is considered an underlying parameter for the optimization. Conversely, the penetration of nitrogen into the AISI316L surface was scarce when Ar-N-2 plasma was used, irrespective of the gas mixture ratio. Such a phenomenon indicates that Ar-N-2 plasma is ineffective for nitriding. However, the effects of H-2-N-2 plasma, which are not limited to the surface reaction, are beneficial to facilitate nitriding.
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