Journal
THIN SOLID FILMS
Volume 737, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2021.138954
Keywords
Molecular dynamics; Structure; Intermixing; Deformation; Zr content; Scratching depth
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Funding
- Ministry of Science and Technology, Taiwan [MOST 110-2221-E-992-037-MY3, MOST 109-2221-E-992-009-MY3]
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Using molecular dynamics simulations, it is found that decreasing the Zr content in the ZrxCu100-x alloy increases structural stability and hardness, while increasing Zr content leads to increased surface roughness but improved smoothness after annealing.
The molecular dynamics simulations method is applied to survey the deposition and annealing processes of ZrxCu100-x film on a Cu(001) surface. The influences of ZrxCu100-x compositions and depths on the force, deformation behavior, pile-up, and hardness are investigated using nano scratching and nanoindentation processes. We find out that the structure of ZrxCu100-x alloy has stability increases when decreasing the Zr content. The surface roughness of Zr-Cu film increases when improving the Zr content. After annealing, the morphology surface of the Zr-Cu amorphous alloy becomes smoother. The scratching forces and average friction coefficient of the Zr20Cu80 film surge as the scratching depth rises. While the pile-up height, normal force, and friction force decrease as increasing the Zr ratio. Under the plastic and elastic deformations, shear transformation zones are formed in the Zr-Cu amorphous film. While in the nanoindentation process, the hardness of ZrxCu100-x film amorphous film tends to decrease when increasing the Zr content.
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