4.7 Article

MEMS based ultra-high order frequency multiplication utilizing superharmonic synchronization effect

Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 332, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2021.113152

Keywords

Frequency multiplication; Micromechanical resonator; RF MEMS; Superharmonic synchronization

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A novel frequency multiplication mechanism utilizing superharmonic synchronization (SHS) effect in micromechanical resonator is proposed, achieving high-rate frequency amplification, improved output signal stability, and increased signal to noise ratio. Additionally, a frequency automatic tracking system is designed to expand the working range and solve the limitation of narrow synchronization range.
Frequency multipliers are widely present in electronic system, which always cooperates with low frequency local oscillator for delivering an output wave with a frequency that an exact integral multiple of the input frequency. Conventional frequency multiplier such as step recovery diode, field-effect transistors, low spurious harmonic, etc., usually has only two or three low multiplication factor. Multi-stage frequency doublers can accumulate the multiplication factor, however, has high power consumption and negative conversion gain. Here, we proposed a novel frequency multiplication mechanism utilizing superharmonic synchronization (SHS) effect in micromechanical resonator. We achieved up to 121th ultra-high frequency amplification with frequency stability of output signal 92 times improved and signal to noise ratio 20% increased. To solve the limitation of narrow synchronization range, a frequency automatic tracking system is designed to expand the working range from 0.62 Hz to 27.5 kHz. The proposed frequency amplification is a promising candidate for frequency multipliers and provides an alternative mechanism for micromechanical sensing and signal processing system. (c) 2021 Elsevier B.V. All rights reserved.

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