Thickness shear SMR resonator based on Yttrium-doped AlN for high sensitive liquid sensors

AlN doped with transition metals becomes the key for high performance acoustic wave devices due to its improved piezoelectricity after the incorporation of dopants. In this paper, solidly mounted resonator (SMR) based on Yttrium (Y) doped AlN and operates in thickness shear (TS) mode is numerically studied for liquids characterization. The modeling of the TS-SMR is done by finite element analysis and the results are compared to experimental data for validation. After that, the effect of Y concentrations on the acoustic displacement profiles, the resonance frequency and the admittance of the SMR is investigated. The sensitivity of the TS mode resonator to liquids mass loading, viscosity and conductivity is studied for different Y concentrations and different glycerol-in-water contents. The obtained results show that doping AlN with Y enhances the electromechanical and liquids sensing capabilities of TS-SMR and contributes in the development of high sensitive sensors for liquids characterization. (c) 2021 Elsevier B.V. All rights reserved.

Automated summary

This paper numerically studies a solidly mounted resonator (SMR) based on AlN doped with Yttrium (Y) in thickness shear (TS) mode, which shows improved electromechanical performance and liquid sensing capabilities. The effect of Y concentrations on the acoustic properties of the SMR and its sensitivity to liquids mass loading, viscosity, and conductivity are investigated. The results demonstrate the potential of Y-doped AlN for high sensitive sensors in liquids characterization.