Simulation and experiment of miniaturized housing structure for MEMS thermal wind sensors

This paper, for the first time, investigates the effects of miniaturized housing structure with various parameters on micro-electro-mechanical systems (MEMS) thermal wind sensors by simulation and experiments. Pillar diameter, number, height and curve-shaped top cover with different radian are considered to find out their influence on sensors performance. In the simulation, finite element method (FEM) software COMSOL is applied to simulate the 3D packaged sensor model. Then sensors with different housing parameters are tested in the wind tunnel based on thermal calorimetric principle, which uses flow-induced temperature gradient between symmetrically distributed thermistors to represent wind speed. An agreement between simulation and experiment is obtained, and the results demonstrate that the device's performance can be improved with smaller pillar diameter, more pillar number, and smaller pillar height. Moreover, the curved roof is designed, which provides a possibility for high wind speed measurement. (c) 2021 Published by Elsevier B.V.

Automated summary

This study investigates the effects of miniaturized housing structure on MEMS thermal wind sensors for the first time through simulation and experiments, showing that smaller pillar diameter, more pillar number, and lower pillar height improve device performance. Additionally, a curved roof design is proposed for high wind speed measurement.