Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 331, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2021.113052
Keywords
Ferroelectric relaxor crystal; Piezoelectric motor; Bending-bending mode; Piezoelectric actuator; Piezoelectric stack
Funding
- National Natural Science Foundation of China [52002312, 51922083]
- China Postdoctoral Science Foundation [2019M663720]
- Fundamental Research Funds for the Central Universities [xzy012020005, xxj022019034, xpt012020025]
- development programme of Shaanxi province [2019ZDLGY04-09]
- 111 Project [B14040]
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This study presents a bending-bending mode piezoelectric actuator based on PIN-PMN-PT single crystals, featuring ultrahigh piezoelectric coefficient and lower driving voltage requirements, suitable for low-voltage precise actuation applications.
Piezoelectric actuators are important elements for compact actuations with high precision; however, driving voltage reduction is demanding for integration and minimization of precision actuations. In this work, we proposed a bending-bending mode piezoelectric actuator based on multilayered Pb(In1/2Nb1/2)O3Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystals. Ultrahigh apparent piezoelectric coefficient d33 of -10,800 pC/N is achieved in four crystal stacks. The crystal stacks are used to fabricate bending-bending mode piezoelectric actuators to reduce driving voltage. Experimental results show that it can produce a maximum traveling velocity of 3.28 mm/s under the driving voltage of 130 Vpp at 1000 Hz and minimum step resolution of 0.35 mu m with 25 Vpp driving voltage. Conventional piezoelectric actuators require driving voltage of -300 Vpp for similar motion velocity. This work demonstrates advantages of crystal stacks in piezoelectric actuators and potential applications in low-voltage precise actuations. (c) 2021 Elsevier B.V. All rights reserved.
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