A bending-bending mode piezoelectric actuator based on PIN-PMN-PT crystal stacks

Piezoelectric actuators are important elements for compact actuations with high precision; however, driving voltage reduction is demanding for integration and minimization of precision actuations. In this work, we proposed a bending-bending mode piezoelectric actuator based on multilayered Pb(In1/2Nb1/2)O3Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystals. Ultrahigh apparent piezoelectric coefficient d33 of -10,800 pC/N is achieved in four crystal stacks. The crystal stacks are used to fabricate bending-bending mode piezoelectric actuators to reduce driving voltage. Experimental results show that it can produce a maximum traveling velocity of 3.28 mm/s under the driving voltage of 130 Vpp at 1000 Hz and minimum step resolution of 0.35 mu m with 25 Vpp driving voltage. Conventional piezoelectric actuators require driving voltage of -300 Vpp for similar motion velocity. This work demonstrates advantages of crystal stacks in piezoelectric actuators and potential applications in low-voltage precise actuations. (c) 2021 Elsevier B.V. All rights reserved.

Automated summary

This study presents a bending-bending mode piezoelectric actuator based on PIN-PMN-PT single crystals, featuring ultrahigh piezoelectric coefficient and lower driving voltage requirements, suitable for low-voltage precise actuation applications.