4.7 Article

Microfluidic electrogenerated chemiluminescence cells using aluminum-doped zinc oxide nanoparticles as an electron injection layer

Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 334, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2021.113329

Keywords

Electrogenerated chemiluminescenc; Microfluidic; Electron injection layer; Aluminum-doped zinc oxide nanoparticles

Funding

  1. Japan Society for the Promotion of Science (JSPS) KAKENHI [JP21K14170]
  2. Toshiba Electronic Devices & Storage Corporation (Japan)

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In this study, highly luminescent microfluidic electrogenerated chemiluminescence (ECL) cells were demonstrated using aluminum-doped zinc oxide nanoparticles (AZO NPs) as an electron injection layer (EIL). The fabricated devices exhibited longer half-lifetime and higher luminance compared to those without EIL. Furthermore, the performance of AZO NPs as an EIL was compared with that of titanium dioxide NPs.
We demonstrated highly luminescent microfluidic electrogenerated chemiluminescence (ECL) cells using aluminum-doped zinc oxide nanoparticles (AZO NPs) as an electron injection layer (EIL). The 5-mu m-thick electro-microfluidic device, in which an approximately 1.6-mu m-thick AZO NPs layer was embedded, was fabricated by microelectromechanical systems processes and a vacuum ultraviolet-assisted direct bonding technique. A tris(2,2'-bipyridine)ruthenium(II) solution was used as an orange-red emitter. A luminance and a half-lifetime were measured to be 161 cd/m(2) at 3.3 V and 30 s at 3.0 V, respectively, which were 2.5 times higher and 4.3 times longer than those of the device without EIL. We also compared the EIL performance of the AZO NPs with that of titanium dioxide NPs. Furthermore, 2-mu m-thick microfluidic ECL cell with the AZO NPs layer was fabricated by the same process, and the maximum luminance increased up to 240 cd/m(2). We expect that the developed microfluidic device will be highly attractive for solution-based display applications. (C) 2021 Elsevier B.V. All rights reserved.

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