4.6 Review

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

Journal

SENSORS
Volume 22, Issue 3, Pages -

Publisher

MDPI
DOI: 10.3390/s22030820

Keywords

surface acoustic waves (SAW); chemical sensors; point-of-care (POC); biosensors; SAW devices; SAW wave; lithium niobate; lithium tantalate; interdigitated electrodes; IDT; crystal cut; MEMS; ZnO; AlN; GaAs; GaN; Rayleigh wave; Love wave; Lamb wave; SH-wave

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This article introduces surface acoustic waves (SAWs) and their applications in sensors. By explaining the physics of guided SAWs and the piezoelectric materials used, it discusses how the materials and cuts can alter sensor functionality. It summarizes key electrode configurations and guidelines for generating different guided wave patterns, and explores the applications of SAW sensors in various fields and potential improvement plans in science and technology.
Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials used for designing SAW sensors. Then, how the piezoelectric materials and cuts could alter the functionality of the sensors is explained. The article summarizes a few key configurations of the electrodes and respective guidelines for generating different guided wave patterns such that new applications can be foreseen. Finally, the article explores the applications of SAW sensors and their progress in the fields of biomedical, microfluidics, chemical, and mechano-biological applications along with their crucial roles and potential plans for improvements in the long-term future in the field of science and technology.

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