4.6 Article

Performance Improvement of Residue-Free Graphene Field-Effect Transistor Using Au-Assisted Transfer Method

Journal

SENSORS
Volume 21, Issue 21, Pages -

Publisher

MDPI
DOI: 10.3390/s21217262

Keywords

graphene; field-effect transistor; graphene transfer; electrical property

Funding

  1. National Research Foundation [NRF-2021R1A2C2013378]
  2. Ministry of Science and ICT of Korea
  3. Korea Basic Science Institute (KBSI) National Research Facilities & Equipment Center - Korea Ministry of Education [2019R1A6C1010031]

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This study proposes a novel graphene transfer technique for fabricating graphene field-effect transistors, which avoids detrimental organic contamination on the graphene surface. Compared to traditional organic film transfer methods, directly depositing Au film on the graphene substrate can protect graphene channels from contamination.
We report a novel graphene transfer technique for fabricating graphene field-effect transistors (FETs) that avoids detrimental organic contamination on a graphene surface. Instead of using an organic supporting film like poly(methyl methacrylate) (PMMA) for graphene transfer, Au film is directly deposited on the as-grown graphene substrate. Graphene FETs fabricated using the established organic film transfer method are easily contaminated by organic residues, while Au film protects graphene channels from these contaminants. In addition, this method can also simplify the device fabrication process, as the Au film acts as an electrode. We successfully fabricated graphene FETs with a clean surface and improved electrical properties using this Au-assisted transfer method.

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