Related references
Note: Only part of the references are listed.Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms
A. El Farsy et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2021)
Physics and technology of magnetron sputtering discharges
J. T. Gudmundsson
PLASMA SOURCES SCIENCE & TECHNOLOGY (2020)
Characterization of transport of titanium neutral atoms sputtered in Ar and Ar/N2 HIPIMS discharges
A. El Farsy et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2019)
Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges
J. Held et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2018)
2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit
Adrien Revel et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2018)
Gas rarefaction in high power impulse magnetron sputtering: comparison of a particle simulation and volume-averaged models
Tomas Kozak et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2018)
Plasma potential of a moving ionization zone in DC magnetron sputtering
Matjaz Panjan et al.
JOURNAL OF APPLIED PHYSICS (2017)
Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS
M. Fekete et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2017)
Particle-balance models for pulsed sputtering magnetrons
Chunqing Huo et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2017)
Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics
G. D. Stancu et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2015)
Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy
P. Vasina et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2015)
Characterization of energetic and thermalized sputtered tungsten atoms using tuneable diode-laser induced fluorescence in direct current magnetron discharge
M. Desecures et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2015)
Estimation of the pressure-distance product for thermalization in sputtering for some selected metal atoms by Monte Carlo simulation
Takeo Nakano et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2014)
Thermalization of the flow of sputtered target atoms during ion-plasma deposition of films
Valery A. Volpyas et al.
PHYSICS LETTERS A (2014)
Electron transport in magnetrons by a posteriori Monte Carlo simulations
C. Costin et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2014)
Ti-Ar scattering cross sections by direct comparison of Monte Carlo simulations and laser-induced fluorescence spectroscopy in magnetron discharges
Daniel Lundin et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2013)
Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics
C. Vitelaru et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2012)
Magnetron sputter deposition as visualized by Monte Carlo modeling
D. Depla et al.
THIN SOLID FILMS (2012)
The break-down of hyperfine structure coupling induced by the Zeeman effect on aluminum 2S1/2→2P1/2 transition, measured by tunable diode-laser induced fluorescence
Catalin Vitelaru et al.
JOURNAL OF APPLIED PHYSICS (2011)
Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge
C. Vitelaru et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2011)
A structure zone diagram including plasma-based deposition and ion etching
Andre Anders
THIN SOLID FILMS (2010)
Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence
Catalin Vitelaru et al.
PLASMA PROCESSES AND POLYMERS (2009)
The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation
K. Van Aeken et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2008)
Deposition of platinum catalyst by plasma sputtering for fuel cells: 3D simulation and experiments
A. Caillard et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2008)
Simulation of Neutral Particle Flow During High Power Magnetron Impulse
Stanislav Kadlec
PLASMA PROCESSES AND POLYMERS (2007)
Anisotropic energies of sputtered atoms under oblique ion incidence
M Stepanova et al.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2004)
State-of-the-art correlated ab initio potential energy curves for heavy rare gas dimers:: Ar2, Kr2, and Xe2
P Slavícek et al.
JOURNAL OF CHEMICAL PHYSICS (2003)
Collision cross sections for argon atoms with argon atoms for energies from 0.01 eV to 10 keV
AV Phelps et al.
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS (2000)