Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 219, Issue 16, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.202100427
Keywords
atomic force microscopy; Kelvin probe force microscopy; photoluminescence; hydrogen plasma; X-ray photoelectron spectroscopy; ZnO
Funding
- Czech Science Foundation (GACR) [19-02858J]
- Mobility Plus project [SAV-AVCR-21-09]
- Operational Program for Research, Development and Education project [CZ.02.1.01/0.0/0.0/16_019/0000760]
- CzechNanoLab Research Infrastructure [LM2018110]
- project Strategy AV21 (program Diagnostic Methods and Techniques)
- Slovak Scientific Grant Agency (VEGA) [2/0157/20]
- Ministry of Science and Technology of Taiwan (MOST) [108-2923-M-153-002-MY3]
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This study investigates the impact of hydrogen plasma treatment on the properties of ZnO surfaces, revealing significant alterations in surface properties before and after plasma treatment depending strongly on the electrical potential of the holder. Various analytical methods, including XPS, photoluminescence spectroscopy, AFM, and KPFM, are employed to analyze the effects on the surface properties.
Plasma provides specific adjustment of solid-state surface properties offering an alternative to high temperature treatment. Herein, hydrogen plasma treatment of monocrystalline (0001) ZnO surface is studied in an inductively coupled plasma reactor with reduced capacitively coupled plasma mode. The crucial role of electrical grounding of the sample holder for plasma etching and related changes in the morphology, optical, and electrical properties of surfaces exposed to electron and ion bombardment are explained. The effects on the chemical composition of the surface are analyzed by X-ray photoelectron spectroscopy (XPS), optical properties by photoluminescence spectroscopy, topography, roughness, and surface measurements by atomic force microscopy (AFM) and Kelvin probe force microscopy (KPFM). All methods show altered ZnO surface properties before and after plasma treatment strongly depending on the electrical potential of the holder.
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