Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 219, Issue 13, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.202100800
Keywords
ellipsometry; nanolayer characterization; optical mapping; reflectometry; thin-film measurement
Funding
- National Development Agency Grants of OTKA [K131515, K129009]
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Thin films are widely used in various applications such as displays, decoration, water proofing, smart windows, and solar panels. Scaling up existing thin-film measurement techniques requires high speed and redesign of configurations.
Thin films covering large surfaces are used in a very wide range of applications from displays through corrosion resistance, decoration, water proofing, smart windows, adhesion performance to solar panels, and many more. Scaling up existing thin-film measurement techniques requires a high speed and the redesign of the configurations. The aim of this review is to give an overview of recent and past activities in the area, as well as an outlook of future opportunities.
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