Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

Article Optics

Optoelectromechanical phase shifter with low insertion loss and a 13π tuning range

Thomas Grottke et al.

Summary: The on-chip optoectromechanical phase shifter presented here achieves low insertion loss and low half-wave voltage, with the ability to generate sub-microsecond pulses and operate in the MHz range.

OPTICS EXPRESS (2021)

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Article Engineering, Electrical & Electronic

Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Alain Yuji Takabayashi et al.

Summary: This article introduces a broadband, compact, and low-loss Silicon Photonic MEMS switch based on a Single-Pole Double-Throw (SPDT) architecture, which can efficiently redirect optical signals to one of two output waveguides on a chip. The switch, with a compact footprint, high extinction ratio, low insertion loss, and fast response time, meets the integration requirements for large-scale reconfigurable Photonic Integrated Circuits.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)

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Article Optics

Dual slot-mode NOEM phase shifter

Reza Baghdadi et al.

Summary: The number of photonic system components is increasing rapidly, especially in CMOS-compatible silicon photonics processes. Despite the challenges of implementing large numbers of cascaded active photonic devices, plasma dispersion and the thermo-optic effect in CMOS-compatible silicon processes can address some criteria. With additional back-end-of-line etch processing steps, silicon photonics platforms can support nano-opto-electro-mechanical (NOEM) phase shifters, but achieving NOEM phase shifters that operate at CMOS-compatible voltages and with low insertion loss remains a challenge.

OPTICS EXPRESS (2021)

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Proceedings Paper Engineering, Electrical & Electronic

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

Gaehun Joa et al.

Summary: A wafer-level vacuum packaging approach was demonstrated to hermetically seal Si photonic MEMS wafers, showing the possibility of a novel vacuum sealing method for MEMS integrated in standard Si photonics platforms. The functionality of photonic MEMS after the hermetic/vacuum packaging was confirmed.

SILICON PHOTONICS XVI (2021)

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Article Optics

Foundry-processed optomechanical photonic integrated circuits

Marcel W. Pruessner et al.

Summary: Photonic integrated circuits (PICs) and optomechanics technology are maturing rapidly, with the ability to fabricate wafer-scale PICs. By designing optomechanical PICs using standard low-loss process design kit (PDK) components, the limitations in inclusion of customized optomechanical devices in foundry-processed PICs are overcome. Experimental results show that a p-phase shift can be achieved over an optomechanical interaction length of only 60 µm, with tunable phase shifting using gradient electric force actuation.

OSA CONTINUUM (2021)

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Article Engineering, Electrical & Electronic