Journal
OPTICS LETTERS
Volume 47, Issue 5, Pages 1129-1132Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.451064
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Funding
- National Research Foundation of Korea [2015R1A5A1037668, 2019R1A2C1010009]
- Samsung Research Funding & Incubation Center of Samsung Electronics [SRFC-TA1703-11]
- National Research Foundation of Korea [2019R1A2C1010009] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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This paper describes a dynamic spectroscopic imaging ellipsometer (DSIE) that utilizes a monolithic polarizing interferometer to provide spatio-spectral ellipsometric phase map data at a speed of 30Hz. The ultrafast mapping capability of the spectroscopic ellipsometer is demonstrated by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 x 50 μm² in an hour.
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Delta(lambda, x) dynamically at a speed of 30Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 x 50 mu m(2) in an hour. (C) 2022 Optica Publishing Group
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