Journal
NANOSCALE
Volume 14, Issue 5, Pages 1990-1996Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/d1nr08095d
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Funding
- National Natural Science Foundation of China [51902309]
- Natural Science Foundation of Fujian Province of China [2021J01520, 2021J05096]
- Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China [2021ZR102]
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This study demonstrates a chemical vapor deposition method to control the growth of large scale MoS2/MoSe2 vertical heterostructures on a molten glass substrate using water as the oxidizing agent, ensuring sufficient and uniform delivery of the metal precursor. This offers an efficient approach for developing integrated electronic and optoelectronic devices with other layered heterostructures.
Herein, we demonstrate a chemical vapor deposition route to the controlled growth of large scale MoS2/MoSe2 vertical van der Waals heterostructures on a molten glass substrate using water as the oxidizing chemical to guarantee a sufficient and uniform delivery of the metal precursor. This work offers an efficient way for developing other layered heterostructures for integrated electronic and optoelectronic devices.
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