Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

Phononic crystals (PnCs) have attracted much attention due to their great potential for dissipation engineering and propagation manipulation of phonons. Notably, the excellent electrical and mechanical properties of graphene make it a promising material for nanoelectromechanical resonators. Transferring a graphene flake to a prepatterned periodic mechanical structure enables the realization of a PnC with on-chip scale. Here, we demonstrate a nanoelectromechanical periodic array by anchoring a graphene membrane to a 9 x 9 array of standing nanopillars. The device exhibits a quasi-continuous frequency spectrum with resonance modes distributed from similar to 120 MHz to similar to 980 MHz. Moreover, the resonant frequencies of these modes can be electrically tuned by varying the voltage applied to the gate electrode sitting underneath. Simulations suggest that the observed band-like spectrum provides an experimental evidence for PnC formation. Our architecture has large fabrication flexibility, offering a promising platform for investigations on PnCs with electrical accessibility and tunability.

Automated summary

Phononic crystals (PnCs) have great potential for dissipation engineering and phonon propagation manipulation, with graphene being a promising material for nanoelectromechanical resonators. A nanoelectromechanical periodic array can be achieved by anchoring a graphene membrane to a vertical array of nanopillars, demonstrating a continuous frequency spectrum for resonance modes.