4.8 Article

Ultrathin Tactile Sensors with Directional Sensitivity and a High Spatial Resolution

Journal

NANO LETTERS
Volume 21, Issue 19, Pages 8304-8310

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.1c02837

Keywords

piezoelectric effect; quantum confined Stark effect; light-emitting diode; gallium nitride; nanowires

Funding

  1. National Science Foundation [EFRI 1240264]
  2. DMR [1409529]
  3. NSF Fellowship [DGE 1841052]
  4. UNIST (Ulsan National Institute of Science Technology) [1.190103.01, 1.200046.01]

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An ultrathin tactile sensor with directional sensitivity, utilizing GaN nanopillar LEDs, demonstrates high spatial resolution mapping. The sensor array exhibits two-dimensional directional sensitivity with a dynamic range of 1-30 mN and an accuracy of +/-1.3 mN. The sensor successfully tracks and maps external force movements, while also registering fingertip movements and fingerprint patterns.
An ultrathin tactile sensor with directional sensitivity and capable of mapping at a high spatial resolution is proposed and demonstrated. Each sensor node consists of two gallium nitride (GaN) nanopillar light-emitting diodes. Shear stress applied on the nanopillars causes the electrons and holes to separate in the radial direction and reduces the light intensity emitted from the nanopillars. A sensor array comprising 64 sensor nodes was designed and fabricated. Two-dimensional directional sensitivity was experimentally confirmed with a dynamic range of 1-30 mN and an accuracy of +/- 1.3 mN. Tracking and mapping of an external force moving across the sensor array were also demonstrated. Finally, the proposed tactile sensor's sensitivity was tested with a fingertip gently moving across the sensor array. The sensor successfully registered the finger movement's direction and fingerprint pattern.

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