Design of a precise linear-rotary positioning stage for optical focusing based on the stick-slip mechanism

A precise linear-rotary positioning stage (LRPS) for optical focusing based on the stick-slip mechanism was proposed. The proposed positioning stage could realize linear motion along the vertical direction and rotary motion around the vertical direction with both large stroke and high resolution. The configuration and operating principle of the proposed LRPS were introduced. The deflection model of the piezoelectric actuator (PEA) was established, and its frequency characteristic was analyzed. A prototype of the LRPS was fabricated, and then several experiments were performed to test its performance. The experiment results showed that the LRPS achieved linear motion with stroke of 5 mm and rotary motion with stroke of 360 degrees. The resolutions of upward and downward linear motions were 82.32 nm and 86.26 nm, respectively. The resolutions of clockwise and anticlockwise rotary motions were 3.90 grad and 3.85 grad, respectively. Finally, the focusing operation was demonstrated, and images with high-resolution were obtained by adjusting the focusing of the imaging system.

Automated summary

The study proposed a precise linear-rotary positioning stage (LRPS) based on the stick-slip mechanism for optical focusing, achieving both large stroke and high resolution linear and rotary motions. Experimental results demonstrated excellent performance of the LRPS in both linear and rotary motions, achieving high-resolution optical focusing.