4.7 Article

On-Chip Direct Laser Writing of PAN-Based Carbon Supercapacitor Electrodes

Journal

MACROMOLECULAR RAPID COMMUNICATIONS
Volume 43, Issue 6, Pages -

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/marc.202100731

Keywords

carbonization; laser-induced carbonization; laser-pyrolysis; microcapacitors; polyacrylonitrile

Funding

  1. BMBF SuperCarbon [13XP5036E]
  2. Max Planck Society
  3. Cluster of Excellence [EXC2154 POLiS]
  4. Projekt DEAL

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The carbonization of PAN by direct laser writing for on-chip microsupercapacitors is demonstrated. The process allows for converting PAN films into carbon electrodes and creating freestanding carbon electrodes by removing non-carbonized material.
The carbonization of polyacrylonitrile (PAN) by direct laser writing to produce microsupercapacitors directly on-chip is reported. The process is demonstrated by producing interdigitated carbon finger electrodes directly on a printed circuit board (PCB), which is then employed to characterize the supercapacitor electrodes. By varying the laser power, the process can be tuned from carbonization to material ablation. This allows to not only convert pristine PAN films into carbon electrodes, but also to pattern and cut away non-carbonized material to produce completely freestanding carbon electrodes. While the carbon electrodes adhere well to the printed circuit board, non-carbonized PAN is peeled off the substrate. Specific capacities as high as 260 mu F cm(-2) are achieved in a supercapacitor with 16 fingers.

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