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Electrochemical Investigation of the Effect of Hydrogen Peroxide Concentration on Platinum-Particle-Assisted Etching of p-Type Silicon in a Hydrofluoric Acid Solution

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2021)

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Electrochemical Investigation of the Effect of Hydrogen Peroxide Concentration on Platinum-Particle-Assisted Etching of p-Type Silicon in a Hydrofluoric Acid Solution

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