Effect of Focused Ion Beam Irradiation on Superconducting Nanowires

Recent advances in focused ion beam (FIB) technology exploit accelerated helium or neon ions, rather than gallium, for maskless fabrication of superconducting nanocomponents. We present a study of the effect of the damage induced by the accelerated ions on the superconducting transition temperature, T-c, of a patterned similar to 85-nm-wide Nb wire, demonstrating a decrease of T-c from similar to 5.5 K in the wire patterned by He ions to similar to 2.8 and 2.3 K exploiting Ne and Ga ions, respectively. In an effort to gain insight into the origin of these changes in T-c, we performed Stopping and Range of Ions in Matter (SRIM) simulations to estimate the damage induced by each type of ion. The simulations show that the lateral distribution of the ion beam and the sputtering rate in using Ne or Ga are significantly larger than those caused by He, consistent with the changes in the measured electrical properties of the nanowire.

Automated summary

Recent advances in focused ion beam (FIB) technology have shown that using accelerated helium or neon ions instead of gallium for maskless fabrication of superconducting nanocomponents can significantly affect the superconducting transition temperature. The damage induced by helium, neon, and gallium ions was studied, and it was found that the transition temperature decreased when using neon and gallium ions. Simulations of the ions in matter showed that the lateral distribution and sputtering rate were greater for neon and gallium ions compared to helium, which correlates with the changes in the electrical properties of the nanowire.