4.5 Article

Spectroscopic Investigations and Thermoelectric Properties of RF-Sputtered ITO Thin Films

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Summary: The electrical and optical properties of indium tin oxide (ITO) thin films prepared by cathodic radio-frequency sputtering were investigated. It was found that using the appropriate RF power, crystalline samples with low resistivity can be achieved, and the resistivity decreases with increasing RF power and deposition time.

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