4.6 Article

Effect of substrate temperature on sputter-deposited boron carbide films

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Summary: The study investigated the effect of substrate tilt on properties of boron carbide (B4C) films, and found that films are amorphous and columnar with an average column width of around 100 nm regardless of substrate tilt. Results also showed that substrate tilt affects film density, residual stress, and refractive index to a certain extent, while oxygen impurities preferentially bond with carbon atoms in inter-columnar regions. Substrate tilt significantly impacts mechanical properties, leading to a decrease of about 50% in interconnection between nano-columns.

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