4.6 Article

Study of a Highly Sensitive Formaldehyde Sensor Prepared With a Tungsten Trioxide Thin Film and Gold Nanoparticles

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 68, Issue 12, Pages 6422-6429

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3120696

Keywords

Au NP; formaldehyde; GM(1,1); gray algorithm; sensing response; WO3

Funding

  1. [MOST 109-2221-E-006-083-MY2]

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A highly sensitive chemoresistive formaldehyde gas sensor based on gold nanoparticles/tungsten trioxide has been successfully fabricated, showing high detection response and recovery speed, capable of detecting very low concentrations of formaldehyde.
A new gold (Au) nanoparticle (NP)/tungsten trioxide (WO3)-based chemoresistive formaldehyde gas sensor is fabricated and reported. The WO3 thin film and Au NPs are prepared by radio frequency (RF) sputtering and rapid thermal evaporation (RTE) approaches, respectively. The utilized Au NPs successfully elevate the surface area/volume (S-A/V) ratio and improve corresponding sensing performance. Experimentally, the proposed Au NP/WO3 sensor shows a very high sensing response of 1303.5 and a response (recovery) time of 16 s (16 s) under introduced 20 ppm formaldehyde (HCHO)/air gas at 225 degrees C. This value is remarkably higher than those of previous reports. In addition, a very low detection content of 40 ppb HCHO/air is obtained, revealing that a widespread detection range of formaldehyde concentration can be acquired for the proposed sensor. To expand the application ability in wireless sensing, a gray algorithm GM(1, 1) model incorporating the first-order differential approach is used to substantially diminish the transmission data, increase the transmission efficiency, and improve the accuracy of the response data. The formaldehyde sensor in this study exhibits advantages including a simple structure, ease of manufacturing, relatively lower cost, practical smart sensing ability, and wireless transmission applications.

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