Journal
IEEE ELECTRON DEVICE LETTERS
Volume 43, Issue 3, Pages 422-425Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3145028
Keywords
Nanoscale devices; Radiative recombination; Fitting; Mathematical models; Doping; Semiconductor device measurement; Physics; Silicon nanowire; photoresponse; doping concentration; carrier mobility; minority carrier life time; depletion region
Categories
Funding
- Special-Key Project of Innovation Program of Shanghai Municipal Commission [2019-07-00-02-E00075]
- National Science Foundation of China (NSFC) [92065103]
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In this work, the explicit photogain theory was employed to study the physics in nanodevices at a single device level. By fitting the theory to experimental results, important device parameters were obtained, which are often difficult to calibrate using traditional techniques. The proposed technique is simple, nondestructive, and accurate enough for probing the physics in nanodevices.
In this work, we employed our newly established explicit photogain theory to probe physics in nanodevices at single device level. A single fitting of the explicit photogain theory to experimental photoresponses allows us to find important device parameters including surface depletion region width W-dep, doping concentration N-A (or N-D), carrier mobility mu(p) (or mu(n)), minority recombination lifetime tau(0) and surface recombination velocity V-srv. These parameters are often difficult to calibrate using traditional semiconductor characterization techniques as the size of semiconductor devices scales down. The extracted parameters were verified with independent Hall effect measurements and other experiments. It shows that this technique is simple, nondestructive and accurate enough to probe the physics in nanodevices at single device level.
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