Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 63, Issue 10, Pages 4067-4073Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2016.2594027
Keywords
High frequency; micromachining; nano-computer numerical control (CNC); terahertz; vacuum electron device (VED)
Funding
- U.K. EPSRC [EP/L026597/1]
- DARPA [G8U543366]
- NSF MRI [CHE-1429258]
- DOE NSTX [DE-FG02-99ER54518]
- DOD [M67854-06-1-5118]
- UNIST [A17291]
- EPSRC [EP/L026597/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/L026597/1] Funding Source: researchfish
Ask authors/readers for more resources
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available