Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 63, Issue 1, Pages 476-480Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2015.2504105
Keywords
Carbon nanotube (CNT); flexible; gas sensor
Funding
- Ministry of Science and Technology [MOST 104-2221-150-042, MOST 103-2221-E-150-034]
- National Science Council of Taiwan [NSC 102-2221-E-150-046, NSC 101-2221-E-150-043]
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Carbon nanotubes (CNTs) have been demonstrated to be one of the most interesting materials for gas sensing. This paper applies a simple method for the direct transfer of high-density CNTs from a SiO2/Si substrate to a flexible substrate for carbon dioxide (CO2), ammonia (NH3), and isopropyl alcohol gas sensing at room temperature. The flexible gas sensor exhibited high sensitivities of 4.8%, 5.4%, and 5.2% at room temperature for ambient CO2, NH3, and isopropyl alcohol gas concentrations of 800 ppm, respectively. In addition, the gas response of the CNT-based chemiresistor is attributed to p-type conductivity in the Au-modified semiconducting CNTs. Very good repeatability of the sensor response to gas concentration is demonstrated, representing a major step toward the low-cost large-scale production of this class of device.
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