Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 63, Issue 3, Pages 933-939Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2016.2519822
Keywords
Anisotropy; Monte Carlo (MC) simulations; Schrodinger quantum corrections (QCs); Silicon-on-Insulator FinFETs
Funding
- EPSRC (UK) [EP/I010084/]
- Engineering and Physical Sciences Research Council [EP/D070236/2] Funding Source: researchfish
- EPSRC [EP/D070236/2] Funding Source: UKRI
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Anisotropic 2-D Schrodinger equation-based quantum corrections dependent on valley orientation are incorporated into a 3-D finite-element Monte Carlo simulation toolbox. The new toolbox is then applied to simulate nanoscale Si Silicon-on-Insulator FinFETs with a gate length of 8.1 nm to study the contributions of conduction valleys to the drive current in various FinFET architectures and channel orientations. The 8.1 nm gate length FinFETs are studied for two cross sections: rectangularlike and triangular-like, and for two channel orientations: < 100 > and < 110 >. We have found that quantum anisotropy effects play the strongest role in the triangular-like < 100 > channel device increasing the drain current by similar to 13% and slightly decreasing the current by 2% in the rectangular-like < 100 > channel device. The quantum anisotropy has a negligible effect in any device with the < 110 > channel orientation.
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