Journal
DIAMOND AND RELATED MATERIALS
Volume 122, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2021.108812
Keywords
DC arc plasma jet CVD; High thermal conductive; Large-size diamond film; The magnetic field
Categories
Funding
- National Key Research and Development Program of China [2016YFE0133200]
- European Union [734578]
- Marie Curie Actions (MSCA) [734578] Funding Source: Marie Curie Actions (MSCA)
Ask authors/readers for more resources
In this study, a freestanding diamond thermal conductive film with a diameter of 7 inches and an average thickness of 1.54 mm was prepared by DC arc plasma jet CVD with multi-stage magnetic fields. The morphology, structure, and thermal conductivity of the diamond film were analyzed. The results showed that the magnetic field improved the thickness uniformity of the film and affected the grain structure and thermal conductivity. The study provides insights into the fabrication and properties of diamond films.
Diamond has attracted increasing attention because it has high thermal conductive. Here, a freestanding diamond thermal conductive film with a diameter of about 7 in. and an average thickness of 1.54 mm was prepared by DC arc plasma jet CVD with multi-stage magnetic fields. Specifically, the thickness uniformity was ensured by adding the magnetic field during the deposition of the freestanding diamond film. The morphology, structure and thermal conductivity of the diamond film were studied. The results showed that the expansion area of the DC arc plasma approached the surface of the substrate increasing duo to add the bottom magnetic field. Structural characterization revealed that the grain of the diamond film in the arc main were coarse, affected by the shape of DC arc plasma, while in the arc center and edge were fine. The main orientation of polycrystalline structure of the diamond film was the crystalline plane of (220). The Raman peaks of diamond film in different areas moved to a higher wavelength, indicating the existence of compressive stress inside the diamond film. The coarse columnar grain and a few grain boundaries were in the arc main. Therefore, the average value of the thermal conductivity (k(&updatedExpOTTOM;)) of diamond film measured in the arc main was 1728.9 +/- 4.9 W/(m.k). Meanwhile, the thermal conductivity of the arc center and edge area was lower than that of the arc main.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available