Journal
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
Volume 13, Issue 1, Pages 313-332Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TASE.2014.2352364
Keywords
Creep; feedback control; feedforward control; hysteresis; piezo-actuated nanopositioning stage; piezoelectric actuator; vibrational dynamics
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Funding
- National Natural Science Foundation of China [51405293, 91023047]
- China Postdoctoral Science Foundation [2014T70415]
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Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.
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