Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 28, Issue 5, Pages 581-584Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2015.2506480
Keywords
Acoustic testing; optical fiber measurements; Fabry-Perot interferometers
Funding
- National High Technology Research and Development Program of China (863 Program) [2015AA04201]
- National Natural Science Foundation of China [51275111]
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A high-sensitivity cross-axial extrinsic fiber Fabry-Perot interferometric acoustic sensor with a 45 degrees angled fiber is proposed. The thickness of pressure-sensing silver diaphragm is 95 nm. The diameter is 1.6 mm yet the flatness of the diaphragm is <30 mu m. The measured dynamic sensitivity of the diaphragm is 67.01 nm/Pa. The sensor exhibits a flat frequency response in the range of 1-6 kHz and a dynamic range of 66.43 dB. The minimal detectable pressure is similar to 107 mu Pa/Hz(1/2) at 3 kHz. The fabricated sensor is expected to be useful for highly sensitive acoustic measurement.
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