4.7 Article

Doping profiling of beveled Si wafers via UV-micro Raman spectroscopy

Related references

Note: Only part of the references are listed.
Article Chemistry, Physical

Micro-Raman investigation of p-type B doped Si(100) revisited

S. Palleschi et al.

Summary: In this study, the doping concentration of B doped single-crystal Czochralski Si(1 0 0) wafers was accurately monitored via micro-Raman spectroscopy. The characteristics of the Si peak were observed to change with doping concentration, showing linear dependencies for both peak widening and frequency-softening. Furthermore, a linear relationship between the reciprocal Fano asymmetry parameter and excitation energy was verified, providing a direct estimate of the hole-phonon interaction strength.

APPLIED SURFACE SCIENCE (2021)

Article Engineering, Electrical & Electronic

Double-Gate TFET With Vertical Channel Sandwiched by Lightly Doped Si

Jang Hyun Kim et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2019)

Article Energy & Fuels

Studying dopant diffusion from Poly-Si passivating contacts

Frank Feldmann et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2019)

Article Energy & Fuels

Impact of the phosphorus emitter doping profile on metal contact recombination of silicon wafer solar cells

Vinodh Shanmugam et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2016)

Article Biochemical Research Methods

Depth profile characterization of ultra shallow junction implants

Philipp Hoenicke et al.

ANALYTICAL AND BIOANALYTICAL CHEMISTRY (2010)

Article Physics, Applied

Stress and doping uniformity of laser crystallized amorphous silicon in thin film silicon solar cells

R. M. B. Agaiby et al.

JOURNAL OF APPLIED PHYSICS (2010)

Article Spectroscopy

Raman study of Fano interference in p-type doped silicon

Brian G. Burke et al.

JOURNAL OF RAMAN SPECTROSCOPY (2010)

Article Physics, Applied

Nanometer strain profiling through Si/SiGe quantum layers

R. M. B. Agaiby et al.

JOURNAL OF APPLIED PHYSICS (2008)

Article Energy & Fuels

Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients

Martin A. Green

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2008)

Review Engineering, Electrical & Electronic

Electrical characterization of semiconductor materials and devices - review

M. J. Deen et al.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS (2006)

Article Instruments & Instrumentation

Electrical activation of ultra-shallow B and BF2 implanted silicon by flash anneal

WS Yoo et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2005)

Article Materials Science, Multidisciplinary

Fano-type interference in the Raman spectrum of photoexcited Si

V Magidson et al.

PHYSICAL REVIEW B (2002)

Article Engineering, Electrical & Electronic

Spreading resistance roadmap towards and beyond the 70 nm technology node

W Vandervorst et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2002)

Article Physics, Applied

Visible and ultraviolet Raman scattering studies of Si1-xGex alloys

M Holtz et al.

JOURNAL OF APPLIED PHYSICS (2000)