Precise localization of DBD plasma streamers using topographically patterned insulators for maskless structural and chemical modification of surfaces

Dielectric insulators with patterned topographic relief were used in dielectric barrier discharge (DBD) plasmas operating at atmospheric pressure to spatially define the formation of filamentary microdischarges (plasma streamers). Precise localization of microdischarge streamers is demonstrated with concomitant treatment patterns on surfaces, enabling localized etching, surface micro-texturing, and chemically and structurally induced wettability modification without the use of lithographic masks on the sample. Proof-of-concept examples include generation of arbitrary streamer patterns (lines, arrays, and letters), anisotropic etching of PMMA films, and spatial patterning of Teflon to be hydrophilic. The approach herein allows user-defined patterning of DBD streamers for subsequent modification and treatment of surfaces (e.g., roughness, wettability, etc.), materials deposition, or etching. Published under an exclusive license by AIP Publishing.

Automated summary

Dielectric insulators with patterned topographic relief are utilized to spatially define filamentary microdischarges in atmospheric pressure DBD plasmas, enabling localized surface treatment such as etching, micro-texturing, and wettability modification. This approach allows for the generation of arbitrary discharge patterns, anisotropic etching of materials, and spatial patterning of surface properties without the need for lithographic masks. The method provides a user-defined way to pattern DBD streamers for subsequent surface modification, material deposition, or etching.