Journal
APPLIED PHYSICS LETTERS
Volume 119, Issue 26, Pages -Publisher
AIP Publishing
DOI: 10.1063/5.0074700
Keywords
-
Categories
Funding
- Key Research and Development Program of Shandong Province, China [2017GGX201007]
- China Postdoctoral Science Foundation [2018T110685]
Ask authors/readers for more resources
High-performance InAlZnO (IAZO) Schottky barrier diodes (SBDs) with top Pd/IAZO Schottky contact were fabricated, with the 50 W-fabricated IAZO SBD exhibiting the best electrical properties, including a close-to-unity ideality factor, high rectification ratio, low series resistance, large barrier heights, and small barrier inhomogeneity. Additionally, the IAZO SBDs prepared at 50 W displayed the best device uniformity, highest reverse breakdown voltage, and fast response when applied to ultraviolet photodetection.
High-performance InAlZnO (IAZO) Schottky barrier diodes (SBDs) with top Pd/IAZO Schottky contact were fabricated, and the influence of sputtering power used to prepare IAZO films on the device performance was investigated. The 50 W-fabricated IAZO SBD exhibited the relatively best electrical properties, including a close-to-unity ideality factor (1.03), a high rectification ratio (1.83 x 10(7)), a low series resistance (237.5 m omega cm(2)), large barrier heights (0.87 and 0.82 eV), and a small barrier inhomogeneity (0.05 eV), which was mainly due to the least background doping density (8.43 x 10(15)/cm(3)) and interface state density (4.30 x 10(10)/eV cm(2)) at 50 W. Meanwhile, the IAZO SBDs prepared at 50 W also displayed the best device uniformity and highest reverse breakdown voltage (-15.23 & PLUSMN; 0.405 V). A 50 W-fabricated IAZO SBD with a horizontal structure was then applied to the ultraviolet photodetector, and it showed good detection effect, especially the fast response with an average rise time of 0.208 s and an average decay time of 0.094 s. Our study indicates the great research value and development potential of IAZO SBDs in future integrated circuits and other fields.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available