Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane

We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (similar to 300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of similar to 8 x 10(6) and a relatively small mode volume of similar to 2(lambda/n)(3). The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360-1470 nm) with Q factors of up to similar to 1800. Our method paves the way for on-chip diamond nanophotonic applications in the telecommunication-wavelength range.

Automated summary

This research demonstrates two-dimensional photonic crystal cavities operating at telecommunication wavelengths on a single-crystal diamond membrane. The cavities have a high quality factor of up to 1800 and a relatively small mode volume. By utilizing electron-beam lithography and vertical dry etching, these cavities are fabricated in the membrane, paving the way for on-chip diamond nanophotonic applications at telecommunication wavelengths.