Optical constants of diamond-like carbon films formed by gas cluster ion beam assisted deposition

We investigated the refractive index (n) and extinction coefficient (k) of diamond-like carbon (DLC) films formed by gas cluster ion beam (GCIB)-assisted deposition. DLC films are classified into four types based on n and k values (at lambda = 2.25 eV). We formed the nonclassified DLC film which has high n (2.4-3.0) and k (0.75-1.0) values. The Raman peak intensity ratio (I (D)/I (G)) of this film was 0.601, which corresponds to the value of a-C:H or ta-C:H. The film density was 2.71 g cm(-3). The nonclassified DLC film has intermediate properties between a-C:H and ta-C:H with respect to the density and k.

Automated summary

This study investigated the refractive index and extinction coefficient of diamond-like carbon films formed by gas cluster ion beam-assisted deposition. Based on the values of n and k at lambda = 2.25 eV, DLC films were classified into four types. The study focused on the nonclassified DLC film, which had high values of n (2.4-3.0) and k (0.75-1.0). The Raman peak intensity ratio of this film corresponded to a-C:H or ta-C:H and the film density was 2.71 g cm(-3). The nonclassified DLC film exhibited intermediate properties between a-C:H and ta-C:H in terms of density and k.