Journal
ADVANCED MATERIALS
Volume 34, Issue 9, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.202107611
Keywords
electron-beam direct writing; free-standing microlaser array; laser display; material processing; organic microlaser
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Funding
- Ministry of Science and Technology of China [2017YFA0204502]
- National Natural Science Foundation of China [22090023, 21790364, 51903238]
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This study proposes a method for fabricating independent photonic structures using a differential polymer chain scission strategy. By one-step electron-beam direct writing on polymer bilayers, the direct formation of suspended optical microcavities is achieved. The technique features high materials compatibility and design flexibility, expanding the application scope of optical microcavities.
Control over material architectures is essential to the performance of photonic devices and systems. Optical isolation of the photonic materials from substrates can significantly enhance their performance but suffers from complicated fabrication processes and limited applications. Here a differential polymer chain scission strategy is proposed to fabricate free-standing photonic structures based on one-step electron-beam direct writing on polymer bilayers (EOB). The polymer molecular mass-dependent sensitivity to electron beam enables differential patterning of the two layers of polymers, leading to the direct formation of suspended optical microcavities. The EOB technique features high materials compatibility and design flexibility for the optical microcavities, which significantly expands the application scope of the suspended optical microcavities. As well as providing a versatile strategy for building high-performance photonic materials, the results provide a promising platform for innovative applications of optical microstructures.
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