DNA-Based Nanofabrication for Nanoelectronics

This review surveys recent developments of DNA nanotechnology related to its applications in nanoelectronics industry. The authors start with a brief introduction of DNA nanostructures, followed by a focused discussion of various DNA-based fabrication approaches that are relevant to the semiconductor industry, including DNA-based doping of semiconductor materials, DNA-based fabrication of nanostructures of metallic, dielectric, and semiconductor materials, and DNA-based lithographic patterning of Si, SiO2, metal, graphene, and polymer substrates. Examples of DNA-templated fabrication of prototype nanoscale transistors and sensors are highlighted. Finally, major technical challenges facing the future applications of DNA nanotechnology in nanoelectronics and beyond are discussed.

Automated summary

This review surveys recent developments of DNA nanotechnology in the nanoelectronics industry, with a particular focus on DNA-based fabrication methods relevant to the semiconductor industry. The topics covered include DNA-based doping of semiconductor materials, fabrication of nanostructures using DNA, and DNA-based lithographic patterning of various substrates. Prototype nanoscale transistors and sensors fabricated using DNA templates are also highlighted. The review concludes by discussing the major technical challenges facing the future applications of DNA nanotechnology in nanoelectronics and beyond.