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Improvement of Thermal and Environmental Stabilities of Short Channel Coplanar Amorphous InGaZnO Thin-Film Transistors by Introducing Amorphous ZrAlO x Interlayer

ADVANCED ENGINEERING MATERIALS (2022)

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Improvement of Thermal and Environmental Stabilities of Short Channel Coplanar Amorphous InGaZnO Thin-Film Transistors by Introducing Amorphous ZrAlO x Interlayer

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