4.8 Article

Vapor-Phase Molecular Doping in Covalent Organosiloxane Network Thin Films Via a Lewis Acid-Base Interaction for Enhanced Mechanical Properties

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 14, Issue 20, Pages 22719-22727

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.1c13257

Keywords

vapor phase infiltration; initiated chemical vapor deposition; atomic layer deposition; organosiloxane polymers; hybrid films; mechanical properties; ZnO

Funding

  1. National Natural Science Foundation of China [21908194, 21938011, 21636008, 21474090]
  2. Natural Science Foundation of Zhejiang Province [LR21B060003]
  3. Zhejiang University
  4. State Key Laboratory of Chemical Engineering [SKL-ChE-19T04]
  5. Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang [2019R01006]
  6. Institute of Zhejiang University-Quzhou [IZQ2019KJ-011]

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This study reports a molecular doping strategy using vapor-phase infiltration to achieve molecular-level dispersion of inorganic components in organosiloxane polymer thin films. By introducing Zn-OH components, the mechanical properties of the hybrid films were enhanced.
Incorporating inorganic components in organosiloxane polymer thin films for enhanced mechanical properties could enable better durability and longevity of functional coatings for a multitude of applications. However, molecularly dispersing the inorganic dopants while preserving the cyclosiloxane rings represents a challenge for cross-linked organosiloxane networks. Here, we report a molecular doping strategy using vapor-phase infiltration. On the basis of the proper Lewis acid-base interaction between diethyl zinc (DEZ) and cyclotrisiloxane rings, we achieved a complete infiltration of the organometallic precursors and well-distributed Zn-OH terminal groups formed in the initiated chemical vapor deposited poly(1,3,5-trimethyl-1,3,5-trivinylcyclotrisiloxane) (PV3D3) films. X-ray photoelectron spectroscopy and nanoscale infrared spectroscopy together with density functional theory simulation reveal that the formation of a Lewis acid-base adduct rather than a ring-opening process is possibly involved in anchoring DEZ in the cross-linked network of PV3D3. Because of the incorporation of Zn-OH components, the organic-inorganic hybrid films obtained via our vapor-phase molecular doping exhibit a 10.2% larger elastic modulus and 67.0% higher hardness than the pristine PV3D3. Unveiling the reaction mechanisms between organometallic precursors and cross-linked organic networks provides new insights for expanding the vapor-phase processing strategies for engineering hybrid materials at the nanoscale.

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