Journal
ADVANCED MATERIALS TECHNOLOGIES
Volume 6, Issue 11, Pages -Publisher
WILEY
DOI: 10.1002/admt.202100589
Keywords
nanofabrication; nanophotonics; silicon carbide
Categories
Funding
- Australian Research Council [CE200100010]
- Singapore Ministry of Education [MOE2017-T2-1-163]
- A*STAR QTE programme
Ask authors/readers for more resources
This study demonstrates the fabrication of functional photonic devices based on 4H Silicon Carbide using a Faraday cage-based oblique angle etch method. The fabricated suspended microring resonators exhibit high-quality factors, showing potential for enhancing the properties of SiC in integrated on chip quantum photonics in the future.
The design and engineering of photonic architectures, suitable to enhance, collect and guide light on chip is needed for applications in quantum photonics and quantum optomechanics. In this work, a Faraday cage-based oblique angle etch method is applied to fabricate various functional photonic devices from 4H Silicon Carbide (SiC)-a material that has attracted attention in recent years, due to its potential in optomechanics, nonlinear optics, and quantum information. The processing conditions are detailed and the geometrical and optical characteristics of the fabricated devices are thoroughly addressed. Employing photoluminescence measurements high-quality factors are demonstrated for suspended microring resonators of up to 3500 in the visible range. Such devices will be applicable in the future to augment the properties of SiC in integrated on chip quantum photonics.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available