4.3 Article

Grazing-incidence X-ray diffraction tomography for characterizing organic thin films

Journal

JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 54, Issue -, Pages 1327-1339

Publisher

INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S1600576721007184

Keywords

grazing-incidence wide-angle X-ray scattering; GIWAXS; tomography; thin films; organic transistors

Funding

  1. DOE Office of Science [DE-SC0012704]
  2. NSF [CMMI-1824674]
  3. MRSEC through Princeton Center for Complex Materials [DMR-1420541]
  4. Princeton Catalysis Initiative

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Grazing-incidence diffraction tomography (GID tomography) is a technique that quantitatively determines the dimension and orientation of crystalline domains in thin films without restrictions on beam coherence, substrate type, or film thickness, extending the capabilities of synchrotron beamlines using standard X-ray scattering experiment setups.
Characterization of thin films is of paramount importance for evaluating material processing outcomes/efficiency as well as establishing structure-property/performance relationships. This article introduces grazing-incidence diffraction tomography (GID tomography), a technique that combines grazing-incidence X-ray scattering and computed tomography to quantitatively determine the dimension and orientation of crystalline domains in thin films without restrictions on the beam coherence, substrate type or film thickness. This computational method extends the capability of synchrotron beamlines by utilizing standard X-ray scattering experiment setups.

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