4.6 Article

UV Durable LCOS for Laser Processing

Journal

CRYSTALS
Volume 11, Issue 9, Pages -

Publisher

MDPI
DOI: 10.3390/cryst11091047

Keywords

liquid crystal; ultraviolet light; laser processing; liquid-crystal-on-silicon

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Liquid-crystal-on-silicon spatial light modulators are commonly used in laser processing applications, with the newly developed UV durable version having a significantly longer lifetime at 355nm wavelength. The investigation into the durability of polymerization inhibitor mixed liquid crystal aims to further extend the lifespan of the device.
Liquid-Crystal-On-Silicon (LCOS) Spatial Light Modulator (SLM) is widely used as a programmable adaptive optical element in many laser processing applications with various wavelength light sources. We report UV durable liquid-crystal-on-silicon spatial light modulators for one-shot laser material processing. Newly developed LCOS consists of UV transparent materials and shows a lifetime 480 times longer than the conventional one in 9.7 W/cm(2) illumination at 355 nm. We investigated the durability of polymerization inhibitor mixed liquid crystal in order to extend its lifetime.

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